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2024
Effects of post-deposition annealing in BaTiO3/4H-SiC MOS capacitors using aerosol deposition method
J.S. Choi, H.W. Lee, T.H. Lee, S.R. Park, S.H. Chung, Y.H. Cho, G.H. Lee, M.A. Schweitz, C. Park, W.H. Shin, J.M. Oh, S.M. Koo
Appl. Phys. Lett., 130 (2024) 1-9.
Influence of particle size distribution on dielectric, electrical, and microstructural properties of aerosol-deposited Ga2O3 film for advanced electronic device
J.W. Lee, J. H. Won, D.G. Choi, J.B. Jeon, S. Kim, C. Park, W.H. Shin, K. Won, S.M. Koo, J.M. Oh
Ceram. Int., 50 (2024) 14067-14076.
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